Coating
Clean vacuum is important in coating processes to avoid unwanted contamination. Our oil-free vacuum pumps are ideally suited for the range down to 10-3 mbar and as backing pumps for turbomolecular pumps.
Vacuum for coating processes
Clean vacuum for high-quality coatings
Vacuum is required for various coating processes such as PVD or CVD. The required process vacuum ranges from the low vacuum range (atmosphere to 1 mbar) to the high vacuum range (10-3 to 10-7 mbar).
Clean vacuum is very important for coating processes in order to avoid contamination of the coatings. Oil-free pump types are therefore preferred in order to avoid any adverse effects from oil vapors. It is also important to ensure that the pump does not generate any abrasion that enters the vacuum system.
If corrosive media are used, the pump should also be chemically resistant.
For the pressure range down to 1 mbar, diaphragm pumps meet all these requirements perfectly. For the pressure range down to 10-3 mbar, the screw pump is the best choice.
Both pump types are also ideal as backing pumps for HV and UHV systems.